Search Results - "Burberry, Mitchell"

Cycle time effects on growth and transistor characteristics of spatial atomic layer deposition of zinc oxide.

Authors: Nelson, Shelby F. Levy, David H. Tutt, Lee W. et al.

Source: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Jan2012, Vol. 30 Issue 1, p01A154, 6p