Search Results - "Radiofrequency sputtering"

Synthesis and structural characterization of MAX phase thin films by radio frequency sputtering and annealing.

Authors: Rostamian, Fatemeh Shafiekhani, Aziziollah

Source: Scientific Reports. 11/4/2025, Vol. 15 Issue 1, p1-14. 14p.

RF sputtered Ga2O3 thin-films for solar-blind UV-C detection: Investigating effects of crystallinity, stoichiometry, and ambient.

Authors: Sharma, Sidhant Le, Phuong Y. Allen, Martin W. et al.

Source: APL Electronic Devices. Sep2025, Vol. 1 Issue 3, p1-10. 10p.

Effects of substrate bias on the properties of TiCrN films deposited on 316L by RF magnetron sputtering.

Authors: Madaoui, Noureddine Azibi, Mourad Lemdani, Ferroudja et al.

Source: Zeitschrift für Naturforschung Section A: A Journal of Physical Sciences. Aug2025, Vol. 80 Issue 8, p753-762. 10p.

High-Q Shear Mode ZnO-based Film Bulk Acoustic Resonators with Air Cavity for Liquid-Phase Sensing Applications.

Authors: Takuli, Aditya Pratap Singh Patel, Raju Majumder, Tanmoy et al.

Source: Semiconductors. Apr2026, Vol. 60 Issue 4, p420-430. 11p.

Subject Terms: *Radiofrequency sputtering, *Biosensors, *Surface morphology, *Air gap (Engineering), *Finite element method

Impact of deposition rate on structural, optical, and electrical properties of WS2 thin films.

Authors: Jafari, Monireh Shahidi, Mohammad Mahdi Ehsani, Mohammad Hossein

Source: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films. Mar2026, Vol. 44 Issue 2, p1-9. 9p.

Subjects: Thin films, Radiofrequency sputtering, Electric properties, Sputtering (Physics), Nanostructured materials, Morphology, Optical properties, Crystallinity

Defect characterization of amorphous selenium-doped Ga2O3 grown by radio frequency sputtering.

Authors: Wang, Xue-Qi Wang, Yuantao Zou, Jiahao et al.

Source: Applied Physics Letters. 6/22/2026, Vol. 128 Issue 25, p1-8. 8p.

Fabrication and characterization of WS2/AlN/Si S-I-S heterojunction for emergent material photovoltaic applications.

Authors: Benhaliliba, M. Kaya, M. Dönmez Özçelik, S. et al.

Source: Applied Physics A: Materials Science & Processing. Apr2025, Vol. 131 Issue 4, p1-13. 13p.

Subjects: Aluminum nitride, Radiofrequency sputtering, Locker rooms, Surface morphology, Heterojunctions

WO3/NiO composite nanoparticles as promising material for low power UV-light sensor.

Authors: Pojar, Thsurhotho Kera, Kevileno Chetri, Priyanka et al.

Source: Applied Physics A: Materials Science & Processing. Feb2025, Vol. 131 Issue 2, p1-8. 8p.

Subjects: Radiofrequency sputtering, Photodetectors, Detectors, Nanoparticles, Nanocomposite materials

High Capacitance Density and Thermal Stability in Strontium.

Authors: Feng, Yilong Lu, Zhenya Lv, Ming

Source: Materials (1996-1944). Apr2025, Vol. 18 Issue 8, p1687. 12p.

Subjects: Radiofrequency sputtering, Magnetron sputtering, Thin films, Substrates (Materials science), Dielectric properties

Effect of Annealing on LiCoO 2 Thin Film Deposited by RF Magnetron Sputtering.

Authors: Benzarti, Zohra Castro, José David Carneiro, Edgar et al.

Source: Materials (1996-1944). Mar2025, Vol. 18 Issue 6, p1217. 19p.

Subjects: Substrates (Materials science), Radiofrequency sputtering, Magnetron sputtering, Sputter deposition, Thin films, Magnetrons

The Effect of Al 2 O 3 Nanoparticles on Hexagonal Boron Nitride Films Resulting from High-Temperature Annealing.

Authors: Li, Qiang Liu, Kangkang Chen, Ransheng et al.

Source: Nanomaterials (2079-4991). Apr2025, Vol. 15 Issue 7, p484. 11p.

Subjects: Radiofrequency sputtering, Magnetron sputtering, Aluminum oxide, Transition temperature, Thin films

Features of Interlayer Interfaces in Transparent Conducting Oxide/Metal/Oxide Trilayer Structures.

Authors: Asvarov, A. Sh. Akhmedov, A. K. Murliev, E. K. et al.

Source: Crystallography Reports. Dec2024, Vol. 69 Issue 7, p1144-1149. 6p.

Subjects: Radiofrequency sputtering, Transmission electron microscopy, Metallic oxides, Magnetron sputtering, X-ray spectroscopy

Photoelectric characteristic of single-phase InxGa1-xN films with tunable bandgap through RF magnetron sputtering.

Authors: Li, Ziyuan Shen, Longhai Zhou, Ouxiang et al.

Source: Journal of Materials Science. Dec2024, Vol. 59 Issue 47, p21828-21845. 18p.

Subjects: Radiofrequency sputtering, Radio frequency, Phase separation, Surface morphology, Photoluminescence, Photoelectricity, Magnetron sputtering

Analysis of interface states in Zn/p-NiO Schottky barrier diode.

Authors: Tyagi, Manisha Raj, V. Bhasker

Source: Journal of Materials Science: Materials in Electronics. Aug2024, Vol. 35 Issue 22, p1-14. 14p.

Subjects: Schottky barrier diodes, Radiofrequency sputtering, Substrates (Materials science), Density of states, Thin films

Spectroscopic analysis and thermoelectric properties of ITO/Cu/Ni/ITO multilayer by RF sputtering.

Authors: Tchenka, Abdelaziz Agdad, Abdelali Amiri, Lahoucine et al.

Source: Applied Physics A: Materials Science & Processing. May2024, Vol. 130 Issue 5, p1-8. 8p.

Subjects: Thermoelectric materials, Radiofrequency sputtering, Copper, Seebeck coefficient, Optical glass, Multilayered thin films

Octal-Shaped Defected Ground with Multi-Slotted Nanomaterial Coated Patch for C and X-Band Wireless Applications.

Authors: Ambresh P. A.¹ ambreshpa@rediffmail.com

Source: IUP Journal of Electrical & Electronics Engineering. Jul2024, Vol. 17 Issue 3, p26-32. 7p.

Subjects: Radiofrequency sputtering, Antennas (Electronics), Nanostructured materials, Resonance, Bandwidths

Characterization of NiCuO x N y Coatings Obtained via RF Sputtering: Structure, Morphology, and Optical Properties.

Authors: Velásquez-Méndez, Karen Lizzette Alfonso, José Edgar Bethencourt, Manuel et al.

Source: Materials (1996-1944). Jul2024, Vol. 17 Issue 13, p3264. 17p.

Subjects: Radiofrequency sputtering, Rare earth metals, Optical properties, Thin films, X-ray photoelectron spectroscopy, Nitrogen, Atmospheric nitrogen

Influence of power and duration on RF sputtering for the formation of terbium oxide passivation layers via the argon ambient.

Authors: Sifawa, Abubakar A. Mohammad, Sabah M. Muhammad, A. et al.

Source: Journal of Materials Science: Materials in Electronics. May2024, Vol. 35 Issue 14, p1-18. 18p.

Subjects: Terbium, Radiofrequency sputtering, Passivation, Field emission electron microscopy, Atomic force microscopy, Surface roughness

Enhancing Ultrasonic Echo Response of AlN Thin Film Transducer Deposited by RF Magnetron Sputtering.

Authors: Wang, Fengqi Ye, Qinyan Luo, Kun et al.

Source: Sensors (14248220). Sep2024, Vol. 24 Issue 17, p5820. 12p.

Enhanced piezoelectric response in V-doped LiNbO3 films.

Authors: Zeng, Xiaomei Xu, Chang Rakhimov, Rakhimbergan et al.

Source: Ceramics International. Sep2025:Part A, Vol. 51 Issue 21, p33441-33450. 10p.

Subjects: High-entropy alloys, Radiofrequency sputtering, Ultrasonic transducers, Ultrasonic waves, Piezoelectric materials