Search Results - "Tan, Zhi-Rou"

Methods for automatically obtaining the sputtering-induced roughness upon depth profiling of polycrystalline films.

Authors: Liu, Gong-Wen Ye, Jin-Peng Tan, Zhi-Rou et al.

Source: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Mar2025, Vol. 43 Issue 2, p1-9, 9p

Influences of sputtered crater geometry on glow discharge spectrometry depth profile.

Authors: Liu, Gong-Wen Tan, Zhi-Rou Guo, Rong-Rong et al.

Source: Microchemical Journal. Jul2026, Vol. 226, pN.PAG-N.PAG. 1p.

Subjects: Glow discharges, Depth profiling