Search Results - "Tan, Zhi-Rou"

Methods for automatically obtaining the sputtering-induced roughness upon depth profiling of polycrystalline films.

Authors: Liu, Gong-Wen Ye, Jin-Peng Tan, Zhi-Rou et al.

Source: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Mar2025, Vol. 43 Issue 2, p1-9, 9p