View in EDS

Demonstration of a Multi‐Layer, Lithographically Manufactured Plasma Spectrometer.

Saved in:
Bibliographic Details
Title: Demonstration of a Multi‐Layer, Lithographically Manufactured Plasma Spectrometer.
Authors: Scime, E. E.1 (AUTHOR) escime@wvu.edu, Dugas, M.2 (AUTHOR), Gilbert, T. J.1 (AUTHOR), John, R.1 (AUTHOR), Keesee, A. M.3 (AUTHOR), Wagner, G.2 (AUTHOR)
Source: Journal of Geophysical Research. Space Physics. Jan2024, Vol. 129 Issue 1, p1-9. 9p.
Subject Terms: Microspacecraft, Electrostatic analyzers, Integrated circuits, Electron beams, Space plasmas, Low voltage systems
Abstract: Development of new plasma instruments is needed to enable constellation‐ and small satellite‐based missions. Key steps in the development pathway of ultra‐compact plasma instruments employing lithographically patterned wafers are the implementation of layer‐to‐layer electrical interconnects and demonstration of massively parallel measurements, that is, simultaneous measurements through multiple identical plasma analyzer structures. Here we present energy resolved measurements of electron beams using a 5‐layer stack of wafer‐based, energy‐per‐charge, electrostatic analyzers. Each layer has eight distinct analyzer groups that are comprised of multiple micron scale energy‐per‐charge analyzers. The process of fabricating the electrical interconnects between the layers is described and the measured energy resolution and the angular resolution compared to theoretical predictions. The measurements demonstrate successful operation of 400 micron scale analyzers operating in parallel. Plain Language Summary: Spacecraft are expensive and difficult to build. CubeSats, a class of small, inexpensive spacecraft are being used for scientific missions. However, standard instruments to measure the local plasma environment cannot fit on such small spacecraft. Here we describe a new type of space plasma instrument that is manufactured with processes similar to how computer chips are made. These plasma instruments are made by stacking layers of micro‐scale plasma analyzers to create a larger instrument with a significant geometric factor. Each layer includes nearly one hundred small energy‐per‐charge plasma analyzers working in parallel. Initial measurements from a 5‐layer instrument along with the processes used to build the instrument are described in this work. Key Points: Microscale plasma energy analyzer demonstrated in laboratory testsLithographic fabrication process enables low voltage analysis of charged particles up to tens of keV/chargeMulti‐layer instrument required development of a novel fabrication process [ABSTRACT FROM AUTHOR]
Copyright of Journal of Geophysical Research. Space Physics is the property of Wiley-Blackwell and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Database: GreenFILE
FullText Text:
  Availability: 0
Header DbId: 8gh
DbLabel: GreenFILE
An: 175071397
AccessLevel: 6
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: Demonstration of a Multi‐Layer, Lithographically Manufactured Plasma Spectrometer.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AR" term="%22Scime%2C+E%2E+E%2E%22">Scime, E. E.</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> escime@wvu.edu</i><br /><searchLink fieldCode="AR" term="%22Dugas%2C+M%2E%22">Dugas, M.</searchLink><relatesTo>2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Gilbert%2C+T%2E+J%2E%22">Gilbert, T. J.</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22John%2C+R%2E%22">John, R.</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Keesee%2C+A%2E+M%2E%22">Keesee, A. M.</searchLink><relatesTo>3</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Wagner%2C+G%2E%22">Wagner, G.</searchLink><relatesTo>2</relatesTo> (AUTHOR)
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Journal+of+Geophysical+Research%2E+Space+Physics%22">Journal of Geophysical Research. Space Physics</searchLink>. Jan2024, Vol. 129 Issue 1, p1-9. 9p.
– Name: Subject
  Label: Subject Terms
  Group: Su
  Data: <searchLink fieldCode="DE" term="%22Microspacecraft%22">Microspacecraft</searchLink><br /><searchLink fieldCode="DE" term="%22Electrostatic+analyzers%22">Electrostatic analyzers</searchLink><br /><searchLink fieldCode="DE" term="%22Integrated+circuits%22">Integrated circuits</searchLink><br /><searchLink fieldCode="DE" term="%22Electron+beams%22">Electron beams</searchLink><br /><searchLink fieldCode="DE" term="%22Space+plasmas%22">Space plasmas</searchLink><br /><searchLink fieldCode="DE" term="%22Low+voltage+systems%22">Low voltage systems</searchLink>
– Name: Abstract
  Label: Abstract
  Group: Ab
  Data: Development of new plasma instruments is needed to enable constellation‐ and small satellite‐based missions. Key steps in the development pathway of ultra‐compact plasma instruments employing lithographically patterned wafers are the implementation of layer‐to‐layer electrical interconnects and demonstration of massively parallel measurements, that is, simultaneous measurements through multiple identical plasma analyzer structures. Here we present energy resolved measurements of electron beams using a 5‐layer stack of wafer‐based, energy‐per‐charge, electrostatic analyzers. Each layer has eight distinct analyzer groups that are comprised of multiple micron scale energy‐per‐charge analyzers. The process of fabricating the electrical interconnects between the layers is described and the measured energy resolution and the angular resolution compared to theoretical predictions. The measurements demonstrate successful operation of 400 micron scale analyzers operating in parallel. Plain Language Summary: Spacecraft are expensive and difficult to build. CubeSats, a class of small, inexpensive spacecraft are being used for scientific missions. However, standard instruments to measure the local plasma environment cannot fit on such small spacecraft. Here we describe a new type of space plasma instrument that is manufactured with processes similar to how computer chips are made. These plasma instruments are made by stacking layers of micro‐scale plasma analyzers to create a larger instrument with a significant geometric factor. Each layer includes nearly one hundred small energy‐per‐charge plasma analyzers working in parallel. Initial measurements from a 5‐layer instrument along with the processes used to build the instrument are described in this work. Key Points: Microscale plasma energy analyzer demonstrated in laboratory testsLithographic fabrication process enables low voltage analysis of charged particles up to tens of keV/chargeMulti‐layer instrument required development of a novel fabrication process [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Journal of Geophysical Research. Space Physics is the property of Wiley-Blackwell and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=8gh&AN=175071397
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1029/2023JA032194
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 9
        StartPage: 1
    Subjects:
      – SubjectFull: Microspacecraft
        Type: general
      – SubjectFull: Electrostatic analyzers
        Type: general
      – SubjectFull: Integrated circuits
        Type: general
      – SubjectFull: Electron beams
        Type: general
      – SubjectFull: Space plasmas
        Type: general
      – SubjectFull: Low voltage systems
        Type: general
    Titles:
      – TitleFull: Demonstration of a Multi‐Layer, Lithographically Manufactured Plasma Spectrometer.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Scime, E. E.
      – PersonEntity:
          Name:
            NameFull: Dugas, M.
      – PersonEntity:
          Name:
            NameFull: Gilbert, T. J.
      – PersonEntity:
          Name:
            NameFull: John, R.
      – PersonEntity:
          Name:
            NameFull: Keesee, A. M.
      – PersonEntity:
          Name:
            NameFull: Wagner, G.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 01
              Text: Jan2024
              Type: published
              Y: 2024
          Identifiers:
            – Type: issn-print
              Value: 21699380
          Numbering:
            – Type: volume
              Value: 129
            – Type: issue
              Value: 1
          Titles:
            – TitleFull: Journal of Geophysical Research. Space Physics
              Type: main
ResultId 1