Novel Passivation and Gettering Strategy for Silicon Wafer by Al2O3/n‐poly‐Si/SiOx Stack for High‐Efficiency p‐Type Passivating Tunnel Oxide Contact Solar Cells.

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Title: Novel Passivation and Gettering Strategy for Silicon Wafer by Al2O3/n‐poly‐Si/SiOx Stack for High‐Efficiency p‐Type Passivating Tunnel Oxide Contact Solar Cells.
Authors: Khokhar, Muhammad Quddamah1 (AUTHOR), Yousuf, Hasnain2 (AUTHOR), Chu, Mengmeng2 (AUTHOR), Kim, Youngkuk3 (AUTHOR), Jeon, Minsung3 (AUTHOR) mjeon23@skku.edu, Dhungel, Suresh Kumar3 (AUTHOR) suresh@skku.edu, Yi, Junsin1,2,3 (AUTHOR) junsin@skku.edu
Source: Energy Technology. Apr2024, Vol. 12 Issue 4, p1-9. 9p.
Subject Terms: *Solar cells, Polycrystalline silicon, Silicon wafers, Gettering, Passivation, Hydrogenated amorphous silicon, Silicon nitride films
Abstract: This study focuses on the enhanced passivation and gettering of boron‐doped p‐type solar grade silicon wafers by incorporating carrier‐selective and passivating tunnel oxide contact (TOPCon). A symmetrical stack of aluminum oxide (Al2O3)/p‐doped n‐type polysilicon (n‐poly‐Si)/ ultrathin silicon oxide (SiOx) in conjunction with long cycles of forming gas annealing is used for enhancing the silicon wafer quality with a novel approach. Multilayer of n‐poly‐Si/SiOx on p‐type crystalline silicon wafer exhibits an implied open‐circuit voltage (iVoc) of 726 mV, effective carrier lifetime (τeff) of 857 μs, and a low recombination current density (Jo) of 1.9 fA cm−2 when subjected to a postdeposition annealing (PDA) of phosphorus‐doped hydrogenated amorphous silicon (n‐a‐Si:H) at 820 °C. To boost passivation and gettering quality, 10 nm‐thick Al2O3 layers on both sides of n‐poly‐Si/SiOx samples are added. This leads to improved τeff (962 μs), reduced Jo (1.1 fA cm−2), and higher iVoc (728 mV). Herein, a thinner 50 nm n‐poly‐Si layer for improved properties is applied. The experiments show improved passivation and gettering. A Quokka‐3 simulation examines the potential of high‐efficiency p‐type TOPCon cells. A novel solar‐grade p‐type wafer quality enhancement approach is introduced, amalgamated with Quokka‐3 results, which could be a milestone in high‐efficiency p‐type TOPCon solar cell production. [ABSTRACT FROM AUTHOR]
Copyright of Energy Technology is the property of Wiley-Blackwell and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
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  Data: <searchLink fieldCode="AR" term="%22Khokhar%2C+Muhammad+Quddamah%22">Khokhar, Muhammad Quddamah</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Yousuf%2C+Hasnain%22">Yousuf, Hasnain</searchLink><relatesTo>2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Chu%2C+Mengmeng%22">Chu, Mengmeng</searchLink><relatesTo>2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Kim%2C+Youngkuk%22">Kim, Youngkuk</searchLink><relatesTo>3</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Jeon%2C+Minsung%22">Jeon, Minsung</searchLink><relatesTo>3</relatesTo> (AUTHOR)<i> mjeon23@skku.edu</i><br /><searchLink fieldCode="AR" term="%22Dhungel%2C+Suresh+Kumar%22">Dhungel, Suresh Kumar</searchLink><relatesTo>3</relatesTo> (AUTHOR)<i> suresh@skku.edu</i><br /><searchLink fieldCode="AR" term="%22Yi%2C+Junsin%22">Yi, Junsin</searchLink><relatesTo>1,2,3</relatesTo> (AUTHOR)<i> junsin@skku.edu</i>
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  Data: <searchLink fieldCode="JN" term="%22Energy+Technology%22">Energy Technology</searchLink>. Apr2024, Vol. 12 Issue 4, p1-9. 9p.
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  Data: *<searchLink fieldCode="DE" term="%22Solar+cells%22">Solar cells</searchLink><br /><searchLink fieldCode="DE" term="%22Polycrystalline+silicon%22">Polycrystalline silicon</searchLink><br /><searchLink fieldCode="DE" term="%22Silicon+wafers%22">Silicon wafers</searchLink><br /><searchLink fieldCode="DE" term="%22Gettering%22">Gettering</searchLink><br /><searchLink fieldCode="DE" term="%22Passivation%22">Passivation</searchLink><br /><searchLink fieldCode="DE" term="%22Hydrogenated+amorphous+silicon%22">Hydrogenated amorphous silicon</searchLink><br /><searchLink fieldCode="DE" term="%22Silicon+nitride+films%22">Silicon nitride films</searchLink>
– Name: Abstract
  Label: Abstract
  Group: Ab
  Data: This study focuses on the enhanced passivation and gettering of boron‐doped p‐type solar grade silicon wafers by incorporating carrier‐selective and passivating tunnel oxide contact (TOPCon). A symmetrical stack of aluminum oxide (Al2O3)/p‐doped n‐type polysilicon (n‐poly‐Si)/ ultrathin silicon oxide (SiOx) in conjunction with long cycles of forming gas annealing is used for enhancing the silicon wafer quality with a novel approach. Multilayer of n‐poly‐Si/SiOx on p‐type crystalline silicon wafer exhibits an implied open‐circuit voltage (iVoc) of 726 mV, effective carrier lifetime (τeff) of 857 μs, and a low recombination current density (Jo) of 1.9 fA cm−2 when subjected to a postdeposition annealing (PDA) of phosphorus‐doped hydrogenated amorphous silicon (n‐a‐Si:H) at 820 °C. To boost passivation and gettering quality, 10 nm‐thick Al2O3 layers on both sides of n‐poly‐Si/SiOx samples are added. This leads to improved τeff (962 μs), reduced Jo (1.1 fA cm−2), and higher iVoc (728 mV). Herein, a thinner 50 nm n‐poly‐Si layer for improved properties is applied. The experiments show improved passivation and gettering. A Quokka‐3 simulation examines the potential of high‐efficiency p‐type TOPCon cells. A novel solar‐grade p‐type wafer quality enhancement approach is introduced, amalgamated with Quokka‐3 results, which could be a milestone in high‐efficiency p‐type TOPCon solar cell production. [ABSTRACT FROM AUTHOR]
– Name: AbstractSuppliedCopyright
  Label:
  Group: Ab
  Data: <i>Copyright of Energy Technology is the property of Wiley-Blackwell and its content may not be copied or emailed to multiple sites without the copyright holder's express written permission. Additionally, content may not be used with any artificial intelligence tools or machine learning technologies. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.)
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RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.1002/ente.202301031
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 9
        StartPage: 1
    Subjects:
      – SubjectFull: Solar cells
        Type: general
      – SubjectFull: Polycrystalline silicon
        Type: general
      – SubjectFull: Silicon wafers
        Type: general
      – SubjectFull: Gettering
        Type: general
      – SubjectFull: Passivation
        Type: general
      – SubjectFull: Hydrogenated amorphous silicon
        Type: general
      – SubjectFull: Silicon nitride films
        Type: general
    Titles:
      – TitleFull: Novel Passivation and Gettering Strategy for Silicon Wafer by Al2O3/n‐poly‐Si/SiOx Stack for High‐Efficiency p‐Type Passivating Tunnel Oxide Contact Solar Cells.
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      – PersonEntity:
          Name:
            NameFull: Khokhar, Muhammad Quddamah
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            NameFull: Yousuf, Hasnain
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            NameFull: Chu, Mengmeng
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            NameFull: Kim, Youngkuk
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            NameFull: Jeon, Minsung
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            NameFull: Dhungel, Suresh Kumar
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            NameFull: Yi, Junsin
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            – D: 01
              M: 04
              Text: Apr2024
              Type: published
              Y: 2024
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            – TitleFull: Energy Technology
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