APA (7th ed.) Citation

van den Bruele, F. J., Smets, M., Illiberi, A., Creyghton, Y., Buskens, P., Roozeboom, F., & Poodt, P. (2015). Atmospheric pressure plasma enhanced spatial ALD of silver. Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films, 33(1), 1. https://doi.org/10.1116/1.4902561

Chicago Style (17th ed.) Citation

van den Bruele, Fieke J., Mireille Smets, Andrea Illiberi, Yves Creyghton, Pascal Buskens, Fred Roozeboom, and Paul Poodt. "Atmospheric Pressure Plasma Enhanced Spatial ALD of Silver." Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films 33, no. 1 (2015): 1. https://doi.org/10.1116/1.4902561.

MLA (9th ed.) Citation

van den Bruele, Fieke J., et al. "Atmospheric Pressure Plasma Enhanced Spatial ALD of Silver." Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films, vol. 33, no. 1, 2015, p. 1, https://doi.org/10.1116/1.4902561.