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Atmospheric pressure plasma enhanced spatial ALD of silver.

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Title: Atmospheric pressure plasma enhanced spatial ALD of silver.
Authors: van den Bruele, Fieke J.1, Fieke.vandenBruele@tno.nl, Smets, Mireille1, Illiberi, Andrea1, Creyghton, Yves2, Buskens, Pascal3, Roozeboom, Fred4, Poodt, Paul1
Source: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Jan/Feb2015, Vol. 33 Issue 1, p1-6, 6p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 100331712
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Atmospheric pressure plasma enhanced spatial ALD of silver.
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PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=100331712
RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.1116/1.4902561
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      – Code: eng
        Text: English
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      Pagination:
        PageCount: 6
        StartPage: 1
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      – TitleFull: Atmospheric pressure plasma enhanced spatial ALD of silver.
        Type: main
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      – PersonEntity:
          Name:
            NameFull: van den Bruele, Fieke J.
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            NameFull: Smets, Mireille
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            NameFull: Illiberi, Andrea
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            NameFull: Creyghton, Yves
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            NameFull: Buskens, Pascal
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            NameFull: Roozeboom, Fred
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            NameFull: Poodt, Paul
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          Dates:
            – D: 01
              M: 01
              Text: Jan/Feb2015
              Type: published
              Y: 2015
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              Value: 07342101
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              Value: 33
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          Titles:
            – TitleFull: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films
              Type: main
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