Atmospheric pressure plasma enhanced spatial ALD of silver.
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| Title: | Atmospheric pressure plasma enhanced spatial ALD of silver. |
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| Authors: | van den Bruele, Fieke J.1, Fieke.vandenBruele@tno.nl, Smets, Mireille1, Illiberi, Andrea1, Creyghton, Yves2, Buskens, Pascal3, Roozeboom, Fred4, Poodt, Paul1 |
| Source: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Jan/Feb2015, Vol. 33 Issue 1, p1-6, 6p |
| Database: | Applied Science & Technology Source |
| ISSN: | 07342101 |
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| DOI: | 10.1116/1.4902561 |
