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Palladium contamination in silicon.

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Title: Palladium contamination in silicon.
Authors: Polignano, M.L.1, maria.polignano@st.com, Mica, I.1, Ceresoli, M.2, Codegoni, D.1, Somaini, F.1, Bianchi, I.1, Volonghi, D.1
Source: Solid-State Electronics; Apr2015, Vol. 106, p68-77, 10p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 101167762
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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        Value: 10.1016/j.sse.2015.01.024
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        Text: English
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              Text: Apr2015
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              Y: 2015
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