Palladium contamination in silicon.
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| Title: | Palladium contamination in silicon. |
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| Authors: | Polignano, M.L.1, maria.polignano@st.com, Mica, I.1, Ceresoli, M.2, Codegoni, D.1, Somaini, F.1, Bianchi, I.1, Volonghi, D.1 |
| Source: | Solid-State Electronics; Apr2015, Vol. 106, p68-77, 10p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00381101 |
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| DOI: | 10.1016/j.sse.2015.01.024 |