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Effects of temperature on PO and resistivity of ScAlN film.

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Title: Effects of temperature on PO and resistivity of ScAlN film.
Authors: Yang, YX.1,2, 416556737@qq.com, Li, XM.1,2, Zhou, D.1,2, Yang, CT.1,2, Feng, F.1,2, Yang, JS.1,2, Hu, QJ.1,2
Source: Surface Engineering; Oct2015, Vol. 31 Issue 10, p775-778, 4p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 110204314
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Effects of temperature on PO and resistivity of ScAlN film.
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  Data: <searchLink fieldCode="AU" term="%22Yang%2C+YX%2E%22">Yang, YX.</searchLink><relatesTo>1,2</relatesTo>, <i>416556737@qq.com</i><br /><searchLink fieldCode="AU" term="%22Li%2C+XM%2E%22">Li, XM.</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AU" term="%22Zhou%2C+D%2E%22">Zhou, D.</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AU" term="%22Yang%2C+CT%2E%22">Yang, CT.</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AU" term="%22Feng%2C+F%2E%22">Feng, F.</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AU" term="%22Yang%2C+JS%2E%22">Yang, JS.</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AU" term="%22Hu%2C+QJ%2E%22">Hu, QJ.</searchLink><relatesTo>1,2</relatesTo>
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  Data: <searchLink fieldCode="JN" term="%22Surface+Engineering%22">Surface Engineering</searchLink>; Oct2015, Vol. 31 Issue 10, p775-778, 4p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=110204314
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1179/1743294415Y.0000000040
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      – Code: eng
        Text: English
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        PageCount: 4
        StartPage: 775
    Titles:
      – TitleFull: Effects of temperature on PO and resistivity of ScAlN film.
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          Name:
            NameFull: Yang, YX.
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            NameFull: Li, XM.
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            NameFull: Zhou, D.
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            NameFull: Yang, CT.
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            NameFull: Feng, F.
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            NameFull: Yang, JS.
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            NameFull: Hu, QJ.
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            – D: 01
              M: 10
              Text: Oct2015
              Type: published
              Y: 2015
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              Value: 31
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            – TitleFull: Surface Engineering
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