APA (7th ed.) Citation

Tedjini, M., Fournel, F., Moriceau, H., Larrey, V., Landru, D., Kononchuk, O., . . . Rieutord, F. (2016). Interface water diffusion in silicon direct bonding. Applied Physics Letters, 109(11), 111603-1. https://doi.org/10.1063/1.4962464

Chicago Style (17th ed.) Citation

Tedjini, M., F. Fournel, H. Moriceau, V. Larrey, D. Landru, O. Kononchuk, S. Tardif, and F. Rieutord. "Interface Water Diffusion in Silicon Direct Bonding." Applied Physics Letters 109, no. 11 (2016): 111603-1. https://doi.org/10.1063/1.4962464.

MLA (9th ed.) Citation

Tedjini, M., et al. "Interface Water Diffusion in Silicon Direct Bonding." Applied Physics Letters, vol. 109, no. 11, 2016, pp. 111603-1, https://doi.org/10.1063/1.4962464.