Interface water diffusion in silicon direct bonding.
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| Title: | Interface water diffusion in silicon direct bonding. |
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| Authors: | Tedjini, M.1, Fournel, F.1, Moriceau, H.1, Larrey, V.1, Landru, D.2, Kononchuk, O.2, Tardif, S.3, Rieutord, F.3 |
| Source: | Applied Physics Letters; 9/12/2016, Vol. 109 Issue 11, p111603-1-111603-3, 3p, 1 Black and White Photograph, 1 Diagram, 4 Graphs |
| Database: | Applied Science & Technology Source |
| ISSN: | 00036951 |
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| DOI: | 10.1063/1.4962464 |
