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InGaAs-OI Substrate Fabrication on a 300 mm Wafer.

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Title: InGaAs-OI Substrate Fabrication on a 300 mm Wafer.
Authors: Sollier, Sebastien1,2, sebastien.sollier@cea.fr, Widiez, Julie1,2, Julie.widiez@cea.fr, Gaudin, Gweltaz3, gweltaz.gaudin@soitec.com, Mazen, Frederic1,2, frederic.mazen@cea.fr, Baron, Thierry1,4, Thierry.baron@cea.fr, Martin, Mickail1,4, mickail.martin@cea.fr, Roure, Marie-Christine1,2, marie-christine.roure@cea.fr, Besson, Pascal1,2, pascal.besson@cea.fr, Morales, Christophe1,2, christophe.morales@cea.fr, Beche, Elodie1,2, elodie.beche@cea.fr, Fournel, Frank1,2, frank.fournel@cea.fr, Favier, Sylvie1,2, sylvie.favier@cea.fr, Salaun, Amelie1,2, ameli.salaun@cea.fr, Gergaud, Patrice1,2, Patrice.gergaud@cea.fr, Cordeau, Maryline1,2, maryline.cordeau@cea.fr, Veytizou, Christellle3, Christelle.veytizou@soitec.com, Ecarnot, Ludovic3, ludovic.ecarnot@soitec.com, Delprat, Daniel3, daniel.delprat@soitec.com, Radu, Ionut3, ionut.radu@soitec.com, Signamarcheix, Thomas1,2, thomas.signamarcheix@cea.fr
Source: Journal of Low Power Electronics & Applications; Dec2016, Vol. 6 Issue 4, p19, 5p, 1 Color Photograph, 2 Black and White Photographs
Database: Applied Science & Technology Source
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  Data: <searchLink fieldCode="AU" term="%22Sollier%2C+Sebastien%22">Sollier, Sebastien</searchLink><relatesTo>1,2</relatesTo>, <i>sebastien.sollier@cea.fr</i><br /><searchLink fieldCode="AU" term="%22Widiez%2C+Julie%22">Widiez, Julie</searchLink><relatesTo>1,2</relatesTo>, <i>Julie.widiez@cea.fr</i><br /><searchLink fieldCode="AU" term="%22Gaudin%2C+Gweltaz%22">Gaudin, Gweltaz</searchLink><relatesTo>3</relatesTo>, <i>gweltaz.gaudin@soitec.com</i><br /><searchLink fieldCode="AU" term="%22Mazen%2C+Frederic%22">Mazen, Frederic</searchLink><relatesTo>1,2</relatesTo>, <i>frederic.mazen@cea.fr</i><br /><searchLink fieldCode="AU" term="%22Baron%2C+Thierry%22">Baron, Thierry</searchLink><relatesTo>1,4</relatesTo>, <i>Thierry.baron@cea.fr</i><br /><searchLink fieldCode="AU" term="%22Martin%2C+Mickail%22">Martin, Mickail</searchLink><relatesTo>1,4</relatesTo>, <i>mickail.martin@cea.fr</i><br /><searchLink fieldCode="AU" term="%22Roure%2C+Marie-Christine%22">Roure, Marie-Christine</searchLink><relatesTo>1,2</relatesTo>, <i>marie-christine.roure@cea.fr</i><br /><searchLink fieldCode="AU" term="%22Besson%2C+Pascal%22">Besson, Pascal</searchLink><relatesTo>1,2</relatesTo>, <i>pascal.besson@cea.fr</i><br /><searchLink fieldCode="AU" term="%22Morales%2C+Christophe%22">Morales, Christophe</searchLink><relatesTo>1,2</relatesTo>, <i>christophe.morales@cea.fr</i><br /><searchLink fieldCode="AU" term="%22Beche%2C+Elodie%22">Beche, Elodie</searchLink><relatesTo>1,2</relatesTo>, <i>elodie.beche@cea.fr</i><br /><searchLink fieldCode="AU" term="%22Fournel%2C+Frank%22">Fournel, Frank</searchLink><relatesTo>1,2</relatesTo>, <i>frank.fournel@cea.fr</i><br /><searchLink fieldCode="AU" term="%22Favier%2C+Sylvie%22">Favier, Sylvie</searchLink><relatesTo>1,2</relatesTo>, <i>sylvie.favier@cea.fr</i><br /><searchLink fieldCode="AU" term="%22Salaun%2C+Amelie%22">Salaun, Amelie</searchLink><relatesTo>1,2</relatesTo>, <i>ameli.salaun@cea.fr</i><br /><searchLink fieldCode="AU" term="%22Gergaud%2C+Patrice%22">Gergaud, Patrice</searchLink><relatesTo>1,2</relatesTo>, <i>Patrice.gergaud@cea.fr</i><br /><searchLink fieldCode="AU" term="%22Cordeau%2C+Maryline%22">Cordeau, Maryline</searchLink><relatesTo>1,2</relatesTo>, <i>maryline.cordeau@cea.fr</i><br /><searchLink fieldCode="AU" term="%22Veytizou%2C+Christellle%22">Veytizou, Christellle</searchLink><relatesTo>3</relatesTo>, <i>Christelle.veytizou@soitec.com</i><br /><searchLink fieldCode="AU" term="%22Ecarnot%2C+Ludovic%22">Ecarnot, Ludovic</searchLink><relatesTo>3</relatesTo>, <i>ludovic.ecarnot@soitec.com</i><br /><searchLink fieldCode="AU" term="%22Delprat%2C+Daniel%22">Delprat, Daniel</searchLink><relatesTo>3</relatesTo>, <i>daniel.delprat@soitec.com</i><br /><searchLink fieldCode="AU" term="%22Radu%2C+Ionut%22">Radu, Ionut</searchLink><relatesTo>3</relatesTo>, <i>ionut.radu@soitec.com</i><br /><searchLink fieldCode="AU" term="%22Signamarcheix%2C+Thomas%22">Signamarcheix, Thomas</searchLink><relatesTo>1,2</relatesTo>, <i>thomas.signamarcheix@cea.fr</i>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Low+Power+Electronics+%26+Applications%22">Journal of Low Power Electronics & Applications</searchLink>; Dec2016, Vol. 6 Issue 4, p19, 5p, 1 Color Photograph, 2 Black and White Photographs
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