InGaAs-OI Substrate Fabrication on a 300 mm Wafer. - Sollier, Sebastien; Widiez, Julie; Gaudin, Gweltaz; Mazen, Frederic; Baron, Thierry; Martin, Mickail; Roure, Marie-Christine; Besson, Pascal; Morales, Christophe; Beche, Elodie; Fournel, Frank; Favier, Sylvie; et al. (Journal of Low Power Electronics & Applications, 2016)