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Transmission measurements of multilayer interference filters developed for a full integration on Complementary Metal Oxide Semiconductor chips.

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Bibliographic Details
Title: Transmission measurements of multilayer interference filters developed for a full integration on Complementary Metal Oxide Semiconductor chips.
Authors: Masarotto, L.1, lilian.masarotto@cea.fr, Frey, L.1, Charles, M.L.1, Roule, A.1, Rodriguez, G.1, Souil, R.1, Morales, C.1, Larrey, V.1
Source: Thin Solid Films; Jun2017, Vol. 631, p23-28, 6p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 122947536
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Transmission measurements of multilayer interference filters developed for a full integration on Complementary Metal Oxide Semiconductor chips.
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  Data: <searchLink fieldCode="JN" term="%22Thin+Solid+Films%22">Thin Solid Films</searchLink>; Jun2017, Vol. 631, p23-28, 6p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=122947536
RecordInfo BibRecord:
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      – Type: doi
        Value: 10.1016/j.tsf.2017.03.055
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      – Code: eng
        Text: English
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        PageCount: 6
        StartPage: 23
    Titles:
      – TitleFull: Transmission measurements of multilayer interference filters developed for a full integration on Complementary Metal Oxide Semiconductor chips.
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            NameFull: Masarotto, L.
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            NameFull: Roule, A.
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            NameFull: Rodriguez, G.
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            NameFull: Souil, R.
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            – D: 01
              M: 06
              Text: Jun2017
              Type: published
              Y: 2017
          Identifiers:
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              Value: 00406090
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              Value: 631
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