Features of mechanical scanning probe lithography on graphene oxide and As(Ge)Se chalcogenide resist.
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| Title: | Features of mechanical scanning probe lithography on graphene oxide and As(Ge)Se chalcogenide resist. |
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| Authors: | Lytvyn, P. M.1, Malyuta, S. V.2, Indutnyi, I. Z.1, plyt@isp.kiev.ua, Efremov, A. A.1, Slobodyan, O. V.2, serhiy.malyuta@gmail.com, Min'ko, V. I.1, Nazarov, A. N.2, Borysov, O. V.2, Prokopenko, I. V.1 |
| Source: | Semiconductor Physics, Quantum Electronics & Optoelectronics; 2018, Vol. 21 Issue 2, p152-159, 8p |
| Database: | Applied Science & Technology Source |
| ISSN: | 15608034 |
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| DOI: | 10.15407/spqeo21.02.152 |
