Features of mechanical scanning probe lithography on graphene oxide and As(Ge)Se chalcogenide resist.
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| Title: | Features of mechanical scanning probe lithography on graphene oxide and As(Ge)Se chalcogenide resist. |
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| Authors: | Lytvyn, P. M.1, Malyuta, S. V.2, Indutnyi, I. Z.1, plyt@isp.kiev.ua, Efremov, A. A.1, Slobodyan, O. V.2, serhiy.malyuta@gmail.com, Min'ko, V. I.1, Nazarov, A. N.2, Borysov, O. V.2, Prokopenko, I. V.1 |
| Source: | Semiconductor Physics, Quantum Electronics & Optoelectronics; 2018, Vol. 21 Issue 2, p152-159, 8p |
| Database: | Applied Science & Technology Source |
| FullText | Links: – Type: pdflink Text: Availability: 0 |
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| Header | DbId: aci DbLabel: Applied Science & Technology Source An: 131397956 AccessLevel: 2 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=131397956 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.15407/spqeo21.02.152 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 8 StartPage: 152 Titles: – TitleFull: Features of mechanical scanning probe lithography on graphene oxide and As(Ge)Se chalcogenide resist. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Lytvyn, P. M. – PersonEntity: Name: NameFull: Malyuta, S. V. – PersonEntity: Name: NameFull: Indutnyi, I. Z. – PersonEntity: Name: NameFull: Efremov, A. A. – PersonEntity: Name: NameFull: Slobodyan, O. V. – PersonEntity: Name: NameFull: Min'ko, V. I. – PersonEntity: Name: NameFull: Nazarov, A. N. – PersonEntity: Name: NameFull: Borysov, O. V. – PersonEntity: Name: NameFull: Prokopenko, I. V. IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 06 Text: 2018 Type: published Y: 2018 Identifiers: – Type: issn-print Value: 15608034 Numbering: – Type: volume Value: 21 – Type: issue Value: 2 Titles: – TitleFull: Semiconductor Physics, Quantum Electronics & Optoelectronics Type: main |
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