View in EDS

Direct measurement of electrostatic fields within the Zernike electrostatic phase plate using single 155 nm Teflon nanoparticle attached to the pillar-shaped atomic force microscope tip.

Saved in:
Bibliographic Details
Title: Direct measurement of electrostatic fields within the Zernike electrostatic phase plate using single 155 nm Teflon nanoparticle attached to the pillar-shaped atomic force microscope tip.
Authors: Chang, Joe-Ming1, Wu, Wei-Jung2, Chang, Wei-Yu2, Chen, Fu-Rong2, Tseng, Fan-Gang2
Source: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; May2019, Vol. 37 Issue 3, pN.PAG-N.PAG, 7p
Database: Applied Science & Technology Source
FullText Text:
  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 136660208
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: Direct measurement of electrostatic fields within the Zernike electrostatic phase plate using single 155 nm Teflon nanoparticle attached to the pillar-shaped atomic force microscope tip.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Chang%2C+Joe-Ming%22">Chang, Joe-Ming</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Wu%2C+Wei-Jung%22">Wu, Wei-Jung</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Chang%2C+Wei-Yu%22">Chang, Wei-Yu</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Chen%2C+Fu-Rong%22">Chen, Fu-Rong</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Tseng%2C+Fan-Gang%22">Tseng, Fan-Gang</searchLink><relatesTo>2</relatesTo>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Journal+of+Vacuum+Science+%26+Technology%3A+Part+B-Nanotechnology+%26+Microelectronics%22">Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics</searchLink>; May2019, Vol. 37 Issue 3, pN.PAG-N.PAG, 7p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=136660208
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1116/1.5088866
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 7
        StartPage: N.PAG
    Titles:
      – TitleFull: Direct measurement of electrostatic fields within the Zernike electrostatic phase plate using single 155 nm Teflon nanoparticle attached to the pillar-shaped atomic force microscope tip.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Chang, Joe-Ming
      – PersonEntity:
          Name:
            NameFull: Wu, Wei-Jung
      – PersonEntity:
          Name:
            NameFull: Chang, Wei-Yu
      – PersonEntity:
          Name:
            NameFull: Chen, Fu-Rong
      – PersonEntity:
          Name:
            NameFull: Tseng, Fan-Gang
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 05
              Text: May2019
              Type: published
              Y: 2019
          Identifiers:
            – Type: issn-print
              Value: 21662746
          Numbering:
            – Type: volume
              Value: 37
            – Type: issue
              Value: 3
          Titles:
            – TitleFull: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics
              Type: main
ResultId 1