APA (7th ed.) Citation

Kim, H., Lee, D., Hyun, S., Je, S. K., Park, J. G., Bae, J. Y., . . . Kim, I. J. (2019). Development of a Reflective 193-nm DUV Microscope System for Defect Inspection of Large Optical Surfaces. Applied Sciences (2076-3417), 9(23), 5205. https://doi.org/10.3390/app9235205

Chicago Style (17th ed.) Citation

Kim, Hong-Seung, Dong-Ho Lee, Sangwon Hyun, Soon Kyu Je, June Gyu Park, Ji Yong Bae, Geon Hee Kim, and I Jong Kim. "Development of a Reflective 193-nm DUV Microscope System for Defect Inspection of Large Optical Surfaces." Applied Sciences (2076-3417) 9, no. 23 (2019): 5205. https://doi.org/10.3390/app9235205.

MLA (9th ed.) Citation

Kim, Hong-Seung, et al. "Development of a Reflective 193-nm DUV Microscope System for Defect Inspection of Large Optical Surfaces." Applied Sciences (2076-3417), vol. 9, no. 23, 2019, p. 5205, https://doi.org/10.3390/app9235205.