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Development of a Reflective 193-nm DUV Microscope System for Defect Inspection of Large Optical Surfaces.

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Bibliographic Details
Title: Development of a Reflective 193-nm DUV Microscope System for Defect Inspection of Large Optical Surfaces.
Authors: Kim, Hong-Seung1, hskim83@kbsi.re.kr, Lee, Dong-Ho1, Hyun, Sangwon1, Je, Soon Kyu1, Park, June Gyu1, Bae, Ji Yong1, Kim, Geon Hee1, kgh@kbsi.re.kr, Kim, I Jong1, kgh@kbsi.re.kr
Source: Applied Sciences (2076-3417); Dec2019, Vol. 9 Issue 23, p5205, 9p
Database: Applied Science & Technology Source
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ISSN:20763417
DOI:10.3390/app9235205