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Development of a Reflective 193-nm DUV Microscope System for Defect Inspection of Large Optical Surfaces.

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Title: Development of a Reflective 193-nm DUV Microscope System for Defect Inspection of Large Optical Surfaces.
Authors: Kim, Hong-Seung1, hskim83@kbsi.re.kr, Lee, Dong-Ho1, Hyun, Sangwon1, Je, Soon Kyu1, Park, June Gyu1, Bae, Ji Yong1, Kim, Geon Hee1, kgh@kbsi.re.kr, Kim, I Jong1, kgh@kbsi.re.kr
Source: Applied Sciences (2076-3417); Dec2019, Vol. 9 Issue 23, p5205, 9p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 140256009
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
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  Data: Development of a Reflective 193-nm DUV Microscope System for Defect Inspection of Large Optical Surfaces.
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  Data: <searchLink fieldCode="AU" term="%22Kim%2C+Hong-Seung%22">Kim, Hong-Seung</searchLink><relatesTo>1</relatesTo>, <i>hskim83@kbsi.re.kr</i><br /><searchLink fieldCode="AU" term="%22Lee%2C+Dong-Ho%22">Lee, Dong-Ho</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Hyun%2C+Sangwon%22">Hyun, Sangwon</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Je%2C+Soon+Kyu%22">Je, Soon Kyu</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Park%2C+June+Gyu%22">Park, June Gyu</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Bae%2C+Ji+Yong%22">Bae, Ji Yong</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Kim%2C+Geon+Hee%22">Kim, Geon Hee</searchLink><relatesTo>1</relatesTo>, <i>kgh@kbsi.re.kr</i><br /><searchLink fieldCode="AU" term="%22Kim%2C+I+Jong%22">Kim, I Jong</searchLink><relatesTo>1</relatesTo>, <i>kgh@kbsi.re.kr</i>
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  Data: <searchLink fieldCode="JN" term="%22Applied+Sciences+%282076-3417%29%22">Applied Sciences (2076-3417)</searchLink>; Dec2019, Vol. 9 Issue 23, p5205, 9p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=140256009
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        Value: 10.3390/app9235205
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      – Code: eng
        Text: English
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        PageCount: 9
        StartPage: 5205
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      – TitleFull: Development of a Reflective 193-nm DUV Microscope System for Defect Inspection of Large Optical Surfaces.
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            NameFull: Kim, Hong-Seung
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            NameFull: Lee, Dong-Ho
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            NameFull: Hyun, Sangwon
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            NameFull: Je, Soon Kyu
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            NameFull: Park, June Gyu
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            NameFull: Bae, Ji Yong
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            NameFull: Kim, Geon Hee
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            NameFull: Kim, I Jong
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            – D: 01
              M: 12
              Text: Dec2019
              Type: published
              Y: 2019
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              Value: 9
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              Value: 23
          Titles:
            – TitleFull: Applied Sciences (2076-3417)
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