APA (7th ed.) Citation

Gharib, M., Eshraghi, M. J., & Bordbari, M. (2020). Structural and physical characteristics of sputter deposited zirconium nitride thin films by sputtering at various time in Ar-N2 atmosphere. Journal of Materials Science: Materials in Electronics, 31(23), 21515. https://doi.org/10.1007/s10854-020-04664-1

Chicago Style (17th ed.) Citation

Gharib, Mahshad, Mohamad Javad Eshraghi, and Mahdi Bordbari. "Structural and Physical Characteristics of Sputter Deposited Zirconium Nitride Thin Films by Sputtering at Various Time in Ar-N2 Atmosphere." Journal of Materials Science: Materials in Electronics 31, no. 23 (2020): 21515. https://doi.org/10.1007/s10854-020-04664-1.

MLA (9th ed.) Citation

Gharib, Mahshad, et al. "Structural and Physical Characteristics of Sputter Deposited Zirconium Nitride Thin Films by Sputtering at Various Time in Ar-N2 Atmosphere." Journal of Materials Science: Materials in Electronics, vol. 31, no. 23, 2020, p. 21515, https://doi.org/10.1007/s10854-020-04664-1.