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The synthesis of nano-fuzz W2N layer using dense helium and nitrogen plasma.

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Title: The synthesis of nano-fuzz W2N layer using dense helium and nitrogen plasma.
Authors: Wang, Zhijun1, wangzhijun@cdu.edu.cn, Yang, Chi1, yangchi0002@163.com, He, Pingni2, Zhu, Jie1, Zhang, Qian1, Zhao, Peng1, Mao, Xinchun1,3, mxch@caep.cn, Gou, Fujun1,2, gfujun@scu.edu.cn, Zhang, Kun1,2, kzhang@scu.edu.cn
Source: Thin Solid Films; Jan2021, Vol. 717, pN.PAG-N.PAG, 1p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 147791851
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: The synthesis of nano-fuzz W2N layer using dense helium and nitrogen plasma.
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  Data: <searchLink fieldCode="AU" term="%22Wang%2C+Zhijun%22">Wang, Zhijun</searchLink><relatesTo>1</relatesTo>, <i>wangzhijun@cdu.edu.cn</i><br /><searchLink fieldCode="AU" term="%22Yang%2C+Chi%22">Yang, Chi</searchLink><relatesTo>1</relatesTo>, <i>yangchi0002@163.com</i><br /><searchLink fieldCode="AU" term="%22He%2C+Pingni%22">He, Pingni</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Zhu%2C+Jie%22">Zhu, Jie</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Zhang%2C+Qian%22">Zhang, Qian</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Zhao%2C+Peng%22">Zhao, Peng</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Mao%2C+Xinchun%22">Mao, Xinchun</searchLink><relatesTo>1,3</relatesTo>, <i>mxch@caep.cn</i><br /><searchLink fieldCode="AU" term="%22Gou%2C+Fujun%22">Gou, Fujun</searchLink><relatesTo>1,2</relatesTo>, <i>gfujun@scu.edu.cn</i><br /><searchLink fieldCode="AU" term="%22Zhang%2C+Kun%22">Zhang, Kun</searchLink><relatesTo>1,2</relatesTo>, <i>kzhang@scu.edu.cn</i>
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  Data: <searchLink fieldCode="JN" term="%22Thin+Solid+Films%22">Thin Solid Films</searchLink>; Jan2021, Vol. 717, pN.PAG-N.PAG, 1p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=147791851
RecordInfo BibRecord:
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      – Type: doi
        Value: 10.1016/j.tsf.2020.138445
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      – Code: eng
        Text: English
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        PageCount: 1
        StartPage: N.PAG
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      – TitleFull: The synthesis of nano-fuzz W2N layer using dense helium and nitrogen plasma.
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            NameFull: Yang, Chi
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            – D: 01
              M: 01
              Text: Jan2021
              Type: published
              Y: 2021
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              Value: 00406090
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              Value: 717
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