Detectors Array for In Situ Electron Beam Imaging by 16-nm FinFET CMOS Technology.
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| Title: | Detectors Array for In Situ Electron Beam Imaging by 16-nm FinFET CMOS Technology. |
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| Authors: | Wang, Chien-Ping1, Lin, Burn Jeng2, Shih, Jiaw-Ren1, Chih, Yue-Der3, Chang, Jonathan3, Lin, Chrong Jung1, King, Ya-Chin1, ycking@ee.nthu.edu.tw |
| Source: | Nanoscale Research Letters; 5/25/2021, Vol. 16 Issue 1, p1-6, 6p |
| Database: | Applied Science & Technology Source |
| ISSN: | 19317573 |
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| DOI: | 10.1186/s11671-021-03552-9 |
