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Detectors Array for In Situ Electron Beam Imaging by 16-nm FinFET CMOS Technology.

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Title: Detectors Array for In Situ Electron Beam Imaging by 16-nm FinFET CMOS Technology.
Authors: Wang, Chien-Ping1, Lin, Burn Jeng2, Shih, Jiaw-Ren1, Chih, Yue-Der3, Chang, Jonathan3, Lin, Chrong Jung1, King, Ya-Chin1, ycking@ee.nthu.edu.tw
Source: Nanoscale Research Letters; 5/25/2021, Vol. 16 Issue 1, p1-6, 6p
Database: Applied Science & Technology Source
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  Data: Detectors Array for In Situ Electron Beam Imaging by 16-nm FinFET CMOS Technology.
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        Value: 10.1186/s11671-021-03552-9
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      – TitleFull: Detectors Array for In Situ Electron Beam Imaging by 16-nm FinFET CMOS Technology.
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              Text: 5/25/2021
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