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Robust high-bandwidth control of nano-positioning stages with Kalman filter based extended state observer and H∞ control.

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Bibliographic Details
Title: Robust high-bandwidth control of nano-positioning stages with Kalman filter based extended state observer and H∞ control.
Authors: Huang, Wei-Wei1, Li, Linlin1,2, Li, Zhou-Long1, Zhu, Zhiwei3, Zhu, Li-Min1,4
Source: Review of Scientific Instruments; 2021, Vol. 92 Issue 6, p1-15, 15p
Database: Applied Science & Technology Source
Description
ISSN:00346748
DOI:10.1063/5.0048870