Robust high-bandwidth control of nano-positioning stages with Kalman filter based extended state observer and H∞ control.
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| Title: | Robust high-bandwidth control of nano-positioning stages with Kalman filter based extended state observer and H∞ control. |
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| Authors: | Huang, Wei-Wei1, Li, Linlin1,2, Li, Zhou-Long1, Zhu, Zhiwei3, Zhu, Li-Min1,4 |
| Source: | Review of Scientific Instruments; 2021, Vol. 92 Issue 6, p1-15, 15p |
| Database: | Applied Science & Technology Source |
| FullText | Text: Availability: 0 |
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| Header | DbId: aci DbLabel: Applied Science & Technology Source An: 151193570 AccessLevel: 2 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=151193570 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1063/5.0048870 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 15 StartPage: 1 Titles: – TitleFull: Robust high-bandwidth control of nano-positioning stages with Kalman filter based extended state observer and H∞ control. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Huang, Wei-Wei – PersonEntity: Name: NameFull: Li, Linlin – PersonEntity: Name: NameFull: Li, Zhou-Long – PersonEntity: Name: NameFull: Zhu, Zhiwei – PersonEntity: Name: NameFull: Zhu, Li-Min IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 06 Text: 2021 Type: published Y: 2021 Identifiers: – Type: issn-print Value: 00346748 Numbering: – Type: volume Value: 92 – Type: issue Value: 6 Titles: – TitleFull: Review of Scientific Instruments Type: main |
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