Robust high-bandwidth control of nano-positioning stages with Kalman filter based extended state observer and H∞ control.

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Title: Robust high-bandwidth control of nano-positioning stages with Kalman filter based extended state observer and H∞ control.
Authors: Huang, Wei-Wei1, Li, Linlin1,2, Li, Zhou-Long1, Zhu, Zhiwei3, Zhu, Li-Min1,4
Source: Review of Scientific Instruments; 2021, Vol. 92 Issue 6, p1-15, 15p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 151193570
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
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  Data: <searchLink fieldCode="AU" term="%22Huang%2C+Wei-Wei%22">Huang, Wei-Wei</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Li%2C+Linlin%22">Li, Linlin</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AU" term="%22Li%2C+Zhou-Long%22">Li, Zhou-Long</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Zhu%2C+Zhiwei%22">Zhu, Zhiwei</searchLink><relatesTo>3</relatesTo><br /><searchLink fieldCode="AU" term="%22Zhu%2C+Li-Min%22">Zhu, Li-Min</searchLink><relatesTo>1,4</relatesTo>
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PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=151193570
RecordInfo BibRecord:
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      – Type: doi
        Value: 10.1063/5.0048870
    Languages:
      – Code: eng
        Text: English
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        PageCount: 15
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      – TitleFull: Robust high-bandwidth control of nano-positioning stages with Kalman filter based extended state observer and H∞ control.
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            NameFull: Huang, Wei-Wei
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            NameFull: Li, Linlin
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            NameFull: Li, Zhou-Long
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            NameFull: Zhu, Zhiwei
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            NameFull: Zhu, Li-Min
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              M: 06
              Text: 2021
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              Y: 2021
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              Value: 00346748
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              Value: 92
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              Value: 6
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