Effect of oxygen annealing temperature on properties of spatial atomic layer deposited aluminum-doped zinc oxide films. - Hsu, Chia-Hsun; Geng, Xin-Peng; Wu, Wan-Yu; Zhao, Ming-Jie; Huang, Pao-Hsun; Zhang, Xiao-Ying; Su, Zhan-Bo; Chen, Zi-Rong; Lien, Shui-Yang (Materials Science in Semiconductor Processing, 2021)