Active feedback cooling of a SiN membrane resonator by electrostatic actuation.
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| Title: | Active feedback cooling of a SiN membrane resonator by electrostatic actuation. |
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| Authors: | Borrielli, A.1, borrielli@fbk.eu, Bonaldi, M.1, Serra, E.1, Sarro, P. M.2, Morana, B.2 |
| Source: | Journal of Applied Physics; 7/7/2021, Vol. 130 Issue 1, p1-11, 11p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/5.0049721 |
