Active feedback cooling of a SiN membrane resonator by electrostatic actuation.

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Title: Active feedback cooling of a SiN membrane resonator by electrostatic actuation.
Authors: Borrielli, A.1, borrielli@fbk.eu, Bonaldi, M.1, Serra, E.1, Sarro, P. M.2, Morana, B.2
Source: Journal of Applied Physics; 7/7/2021, Vol. 130 Issue 1, p1-11, 11p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 151286509
AccessLevel: 2
PubType: Academic Journal
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        Value: 10.1063/5.0049721
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      – Code: eng
        Text: English
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        PageCount: 11
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      – TitleFull: Active feedback cooling of a SiN membrane resonator by electrostatic actuation.
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            NameFull: Bonaldi, M.
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            NameFull: Serra, E.
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            NameFull: Sarro, P. M.
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              Text: 7/7/2021
              Type: published
              Y: 2021
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              Value: 130
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