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Active feedback cooling of a SiN membrane resonator by electrostatic actuation.

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Bibliographic Details
Title: Active feedback cooling of a SiN membrane resonator by electrostatic actuation.
Authors: Borrielli, A.1, borrielli@fbk.eu, Bonaldi, M.1, Serra, E.1, Sarro, P. M.2, Morana, B.2
Source: Journal of Applied Physics; 7/7/2021, Vol. 130 Issue 1, p1-11, 11p
Database: Applied Science & Technology Source
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