APA (7th ed.) Citation

Hooijschuur, R., Saikumar, N., HosseinNia, S. H., & van Ostayen, R. A. J. (2021). Air-Based Contactless Wafer Precision Positioning System. Applied Sciences (2076-3417), 11(16), 7588. https://doi.org/10.3390/app11167588

Chicago Style (17th ed.) Citation

Hooijschuur, Rico, Niranjan Saikumar, S. Hassan HosseinNia, and Ron A. J. van Ostayen. "Air-Based Contactless Wafer Precision Positioning System." Applied Sciences (2076-3417) 11, no. 16 (2021): 7588. https://doi.org/10.3390/app11167588.

MLA (9th ed.) Citation

Hooijschuur, Rico, et al. "Air-Based Contactless Wafer Precision Positioning System." Applied Sciences (2076-3417), vol. 11, no. 16, 2021, p. 7588, https://doi.org/10.3390/app11167588.