Distribution of the Deposition Rates in an Industrial-Size PECVD Reactor Using HMDSO Precursor. - Gosar, Žiga; Đonlagić, Denis; Pevec, Simon; Gergič, Bojan; Mozetič, Miran; Primc, Gregor; Vesel, Alenka; Zaplotnik, Rok (Coatings (2079-6412), 2021)