Numerical Investigation of the Effects of the Beam Scanning Pattern and Overlap on the Temperature Distribution during the Laser Dopant Activation Anneal Process.
Saved in:
| Title: | Numerical Investigation of the Effects of the Beam Scanning Pattern and Overlap on the Temperature Distribution during the Laser Dopant Activation Anneal Process. |
|---|---|
| Authors: | Choi, Donghyeok1, aaaengzz@daum.net, Shin, Joonghan1,2, jhshin@kongju.ac.kr |
| Source: | Applied Sciences (2076-3417); Nov2021, Vol. 11 Issue 22, p10748, 14p |
| Database: | Applied Science & Technology Source |
| ISSN: | 20763417 |
|---|---|
| DOI: | 10.3390/app112210748 |
