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Numerical Investigation of the Effects of the Beam Scanning Pattern and Overlap on the Temperature Distribution during the Laser Dopant Activation Anneal Process.

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Title: Numerical Investigation of the Effects of the Beam Scanning Pattern and Overlap on the Temperature Distribution during the Laser Dopant Activation Anneal Process.
Authors: Choi, Donghyeok1, aaaengzz@daum.net, Shin, Joonghan1,2, jhshin@kongju.ac.kr
Source: Applied Sciences (2076-3417); Nov2021, Vol. 11 Issue 22, p10748, 14p
Database: Applied Science & Technology Source
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        Value: 10.3390/app112210748
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      – Code: eng
        Text: English
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        PageCount: 14
        StartPage: 10748
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      – TitleFull: Numerical Investigation of the Effects of the Beam Scanning Pattern and Overlap on the Temperature Distribution during the Laser Dopant Activation Anneal Process.
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            NameFull: Choi, Donghyeok
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              Text: Nov2021
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              Y: 2021
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