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Characterization of RF magnetron-sputtered a-BOxNy/ZnO MIS structures for transparent electronics.

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Title: Characterization of RF magnetron-sputtered a-BOxNy/ZnO MIS structures for transparent electronics.
Authors: Iheomamere, Chukwudi E.1, Arnold, Corey L.1, Summers, Jason1, Reidy, Richard F.1, Voevodin, Andrey A.1, Shepherd, Nigel D.1, Nigel.Shepherd@unt.edu
Source: Journal of Materials Science: Materials in Electronics; Jan2022, Vol. 33 Issue 2, p974-984, 11p
Database: Applied Science & Technology Source
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  Data: Characterization of RF magnetron-sputtered a-BOxNy/ZnO MIS structures for transparent electronics.
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        Value: 10.1007/s10854-021-07368-2
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        Text: English
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      – TitleFull: Characterization of RF magnetron-sputtered a-BOxNy/ZnO MIS structures for transparent electronics.
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              Text: Jan2022
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              Y: 2022
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