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Improving automated visual fault inspection for semiconductor manufacturing using a hybrid multistage system of deep neural networks.

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Title: Improving automated visual fault inspection for semiconductor manufacturing using a hybrid multistage system of deep neural networks.
Authors: Schlosser, Tobias1, Friedrich, Michael1, Beuth, Frederik1, Kowerko, Danny1, danny.kowerko@cs.tu-chemnitz.de
Source: Journal of Intelligent Manufacturing; Apr2022, Vol. 33 Issue 4, p1099-1123, 25p
Database: Applied Science & Technology Source
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PubType: Academic Journal
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      – Type: doi
        Value: 10.1007/s10845-021-01906-9
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      – Code: eng
        Text: English
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            NameFull: Friedrich, Michael
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            NameFull: Beuth, Frederik
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              Text: Apr2022
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              Y: 2022
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              Value: 33
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