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Growth mechanism of TiN reaction layers produced on AlN via active metal bonding.

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Bibliographic Details
Title: Growth mechanism of TiN reaction layers produced on AlN via active metal bonding.
Authors: Terasaki, Nobuyuki1,2, terasaki@mmc.co.jp, Sakaguchi, Moe3, Chiba, Hajime3, Ohashi, Touyou1, Nagatomo, Yoshiyuki1, Kuromitsu, Yoshirou1, Sekino, Tohru2, Knowles, Kevin M.4
Source: Journal of Materials Science; Jul2022, Vol. 57 Issue 28, p13300-13313, 14p, 4 Color Photographs, 7 Black and White Photographs, 1 Diagram, 3 Charts, 2 Graphs
Database: Applied Science & Technology Source
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