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Wafer-Scale Fabrication of Silicon Film on Lithium Niobate on Insulator (LNOI).

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Bibliographic Details
Title:	Wafer-Scale Fabrication of Silicon Film on Lithium Niobate on Insulator (LNOI).
Authors:	Chen, Yang^1,2, Zhao, Xiaomeng¹, Li, Zhongxu^1,2, Ke, Xinjian^1,2, Wang, Chengli^1,2, Zhou, Min¹, Li, Wenqin¹, Huang, Kai¹, khuang@mail.sim.ac.cn, Ou, Xin¹, khuang@mail.sim.ac.cn
Source:	Crystals (2073-4352); Oct2022, Vol. 12 Issue 10, p1477-N.PAG, 9p
Database:	Applied Science & Technology Source
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ISSN:	20734352
DOI:	10.3390/cryst12101477