Evolution of the thermal behavior and complexity of end-of-range defects in silicon pre-amorphized by Ge+ implantation.
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| Title: | Evolution of the thermal behavior and complexity of end-of-range defects in silicon pre-amorphized by Ge+ implantation. |
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| Authors: | Belafhaili, Amine1, a.belafhaili@um5r.ac.ma, Laanab, Larbi2 |
| Source: | Journal of Materials Science: Materials in Electronics; Feb2023, Vol. 34 Issue 5, p1-6, 6p |
| Database: | Applied Science & Technology Source |
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| FullText | Links: – Type: pdflink Text: Availability: 1 |
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| Header | DbId: aci DbLabel: Applied Science & Technology Source An: 161982068 AccessLevel: 2 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| Items | – Name: Title Label: Title Group: Ti Data: Evolution of the thermal behavior and complexity of end-of-range defects in silicon pre-amorphized by Ge+ implantation. – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AU" term="%22Belafhaili%2C+Amine%22">Belafhaili, Amine</searchLink><relatesTo>1</relatesTo>, <i>a.belafhaili@um5r.ac.ma</i><br /><searchLink fieldCode="AU" term="%22Laanab%2C+Larbi%22">Laanab, Larbi</searchLink><relatesTo>2</relatesTo> – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22Journal+of+Materials+Science%3A+Materials+in+Electronics%22">Journal of Materials Science: Materials in Electronics</searchLink>; Feb2023, Vol. 34 Issue 5, p1-6, 6p |
| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=161982068 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1007/s10854-022-09794-2 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 6 StartPage: 1 Titles: – TitleFull: Evolution of the thermal behavior and complexity of end-of-range defects in silicon pre-amorphized by Ge+ implantation. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Belafhaili, Amine – PersonEntity: Name: NameFull: Laanab, Larbi IsPartOfRelationships: – BibEntity: Dates: – D: 15 M: 02 Text: Feb2023 Type: published Y: 2023 Identifiers: – Type: issn-print Value: 09574522 Numbering: – Type: volume Value: 34 – Type: issue Value: 5 Titles: – TitleFull: Journal of Materials Science: Materials in Electronics Type: main |
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