Electrical characterization of thin silicon-on-insulator films doped by means of phosphorus end-terminated polymers. - Pulici, Andrea; Kuschlan, Stefano; Seguini, Gabriele; Taglietti, Fabiana; Fanciulli, Marco; Chiarcos, Riccardo; Laus, Michele; Perego, Michele (Materials Science in Semiconductor Processing, 2023)