Protection of Cu from Oxidation by Ta Capping Layer. - Zhidkov, Ivan S.; Kukharenko, Andrey I.; Milyaev, Mikhail A.; Kravtsov, Evgeniy A.; Makarova, Marina V.; Gapontsev, Vladimir V.; Streltsov, Sergey V.; Cholakh, Seif O.; Kurmaev, Ernst Z. (Coatings (2079-6412), 2023)