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Protection of Cu from Oxidation by Ta Capping Layer.

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Bibliographic Details
Title:	Protection of Cu from Oxidation by Ta Capping Layer.
Authors:	Zhidkov, Ivan S.^1,2, i.s.zhidkov@urfu.ru, Kukharenko, Andrey I.^1,2, Milyaev, Mikhail A.², Kravtsov, Evgeniy A.^2,3, Makarova, Marina V.^2,3, Gapontsev, Vladimir V.^1,2, Streltsov, Sergey V.^1,2, Cholakh, Seif O.¹, Kurmaev, Ernst Z.^1,2
Source:	Coatings (2079-6412); May2023, Vol. 13 Issue 5, p926, 6p
Database:	Applied Science & Technology Source
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