APA (7th ed.) Citation

Barin, G., Seguini, G., Chiarcos, R., Ospina, V. M., Laus, M., Lenardi, C., & Perego, M. (2023). Phosphorus activation in silicon: To deglaze or not to deglaze, that is the question. Materials Science in Semiconductor Processing, 165, N.PAG. https://doi.org/10.1016/j.mssp.2023.107691

Chicago Style (17th ed.) Citation

Barin, Gianluca, Gabriele Seguini, Riccardo Chiarcos, Viviana Maria Ospina, Michele Laus, Cristina Lenardi, and Michele Perego. "Phosphorus Activation in Silicon: To Deglaze or Not to Deglaze, That Is the Question." Materials Science in Semiconductor Processing 165 (2023): N.PAG. https://doi.org/10.1016/j.mssp.2023.107691.

MLA (9th ed.) Citation

Barin, Gianluca, et al. "Phosphorus Activation in Silicon: To Deglaze or Not to Deglaze, That Is the Question." Materials Science in Semiconductor Processing, vol. 165, 2023, p. N.PAG, https://doi.org/10.1016/j.mssp.2023.107691.