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Phosphorus activation in silicon: To deglaze or not to deglaze, that is the question.

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Title: Phosphorus activation in silicon: To deglaze or not to deglaze, that is the question.
Authors: Barin, Gianluca1,2, Seguini, Gabriele1, Chiarcos, Riccardo3, Ospina, Viviana Maria3, Laus, Michele1,3, michele.laus@uniupo.it, Lenardi, Cristina2, Perego, Michele1, michele.perego@cnr.it
Source: Materials Science in Semiconductor Processing; Oct2023, Vol. 165, pN.PAG-N.PAG, 1p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 164856679
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Phosphorus activation in silicon: To deglaze or not to deglaze, that is the question.
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PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=164856679
RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.1016/j.mssp.2023.107691
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      – Code: eng
        Text: English
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        PageCount: 1
        StartPage: N.PAG
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      – TitleFull: Phosphorus activation in silicon: To deglaze or not to deglaze, that is the question.
        Type: main
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      – PersonEntity:
          Name:
            NameFull: Barin, Gianluca
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            NameFull: Seguini, Gabriele
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            NameFull: Chiarcos, Riccardo
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            NameFull: Ospina, Viviana Maria
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            NameFull: Laus, Michele
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            NameFull: Lenardi, Cristina
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            NameFull: Perego, Michele
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          Dates:
            – D: 01
              M: 10
              Text: Oct2023
              Type: published
              Y: 2023
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              Value: 165
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            – TitleFull: Materials Science in Semiconductor Processing
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