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Guest Editorial: Dimensional Scaling of Material Functional Properties to Meet Back-End-of-Line (BEOL) Challenges.

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Title: Guest Editorial: Dimensional Scaling of Material Functional Properties to Meet Back-End-of-Line (BEOL) Challenges.
Authors: Rakheja, Shaloo1, rakheja@illinois.edu, Chen, Zhihong2, Chen, Ching-Tzu3
Source: Applied Physics Letters; 7/17/2023, Vol. 123 Issue 3, p1-5, 5p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 165475628
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Guest Editorial: Dimensional Scaling of Material Functional Properties to Meet Back-End-of-Line (BEOL) Challenges.
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  Data: <searchLink fieldCode="AU" term="%22Rakheja%2C+Shaloo%22">Rakheja, Shaloo</searchLink><relatesTo>1</relatesTo>, <i>rakheja@illinois.edu</i><br /><searchLink fieldCode="AU" term="%22Chen%2C+Zhihong%22">Chen, Zhihong</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Chen%2C+Ching-Tzu%22">Chen, Ching-Tzu</searchLink><relatesTo>3</relatesTo>
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  Data: <searchLink fieldCode="JN" term="%22Applied+Physics+Letters%22">Applied Physics Letters</searchLink>; 7/17/2023, Vol. 123 Issue 3, p1-5, 5p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=165475628
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    Identifiers:
      – Type: doi
        Value: 10.1063/5.0165095
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      – Code: eng
        Text: English
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        PageCount: 5
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      – TitleFull: Guest Editorial: Dimensional Scaling of Material Functional Properties to Meet Back-End-of-Line (BEOL) Challenges.
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            NameFull: Rakheja, Shaloo
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            NameFull: Chen, Zhihong
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            NameFull: Chen, Ching-Tzu
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              Text: 7/17/2023
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              Y: 2023
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