Guest Editorial: Dimensional Scaling of Material Functional Properties to Meet Back-End-of-Line (BEOL) Challenges.
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| Title: | Guest Editorial: Dimensional Scaling of Material Functional Properties to Meet Back-End-of-Line (BEOL) Challenges. |
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| Authors: | Rakheja, Shaloo1, rakheja@illinois.edu, Chen, Zhihong2, Chen, Ching-Tzu3 |
| Source: | Applied Physics Letters; 7/17/2023, Vol. 123 Issue 3, p1-5, 5p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00036951 |
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| DOI: | 10.1063/5.0165095 |
