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Guest Editorial: Dimensional Scaling of Material Functional Properties to Meet Back-End-of-Line (BEOL) Challenges.

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Bibliographic Details
Title: Guest Editorial: Dimensional Scaling of Material Functional Properties to Meet Back-End-of-Line (BEOL) Challenges.
Authors: Rakheja, Shaloo1, rakheja@illinois.edu, Chen, Zhihong2, Chen, Ching-Tzu3
Source: Applied Physics Letters; 7/17/2023, Vol. 123 Issue 3, p1-5, 5p
Database: Applied Science & Technology Source
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